发明名称 METHODS AND STRUCTURES FOR PROCESSING SEMICONDUCTOR DEVICES
摘要 Methods of forming semiconductor structures include providing a polymeric material over a carrier substrate, bonding another substrate to the polymeric material, and lowering a temperature of the polymeric material to below about 15° C. to separate the another substrate from the carrier substrate. Some methods include forming a polymeric material over a first substrate, securing a second substrate to the first substrate over the polymeric material, cooling the polymeric material to a temperature below a glass-transition temperature of the polymeric material, and separating the second substrate from the first substrate. Semiconductor structures may include a polymeric material over at least a portion of a first substrate, an adhesive material over the polymeric material, and a second substrate over the adhesive material. The polymeric material may have a glass transition temperature of about 10° C. or lower and a melting point of about 100° C. or greater.
申请公布号 US2015179493(A1) 申请公布日期 2015.06.25
申请号 US201314134199 申请日期 2013.12.19
申请人 Micron Technology, Inc. 发明人 Varghese Sony
分类号 H01L21/683;H01L21/78;B32B38/10;B32B43/00;B32B37/12;B32B37/18 主分类号 H01L21/683
代理机构 代理人
主权项 1. A method of processing a semiconductor structure, comprising: providing a polymeric material over a carrier substrate; bonding another substrate to the polymeric material; and lowering a temperature of the polymeric material to below about 15° C. to separate the another substrate from the carrier substrate.
地址 Boise ID US