发明名称 |
SEMICONDUCTOR ELEMENT, METHOD FOR PRODUCING SAME AND ALIPHATIC POLYCARBONATE |
摘要 |
The objective of the present invention is to provide: a thin film transistor which easily enables self-aligning formation of a source/drain region without requiring a process under vacuum or low pressure or without using expensive equipment; and a method for producing the thin film transistor. A method for producing a thin film transistor according to the present invention comprises: an aliphatic polycarbonate layer formation step for forming an aliphatic polycarbonate layer (50) which covers a semiconductor layer (20) and a gate electrode layer (40) that is arranged on the semiconductor layer (20) with a gate insulating layer (30) being interposed therebetween, and which contains a dopant that converts the semiconductor layer (20) into an n-type or p-type semiconductor layer; and a heating step for introducing the dopant into the semiconductor layer (20), while heating at a temperature at which the aliphatic polycarbonate layer (50) is decomposed. |
申请公布号 |
WO2015093455(A1) |
申请公布日期 |
2015.06.25 |
申请号 |
WO2014JP83187 |
申请日期 |
2014.12.16 |
申请人 |
NATIONAL UNIVERSITY CORPORATION JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;SUMITOMO SEIKA CHEMICALS CO., LTD. |
发明人 |
INOUE, SATOSHI;SHIMODA, TATSUYA;FUJIMOTO, NOBUTAKA;NISHIOKA, KIYOSHI;KARASHIMA, SHUICHI |
分类号 |
H01L21/336;C08G64/02;H01L21/28;H01L29/786 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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