| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for measuring a sample surface shape using a scanning white light interferometer, which enables calculation of a sample surface shape on the basis of both an envelope curve and a phase of an interference waveform to measure the sample surface shape. <P>SOLUTION: On the basis of video file data captured, an envelope curve and a phase of an interference waveform is calculated by using Hilbert transform for each pixel corresponding to a position on a sample surface. A scanning position where the envelope curve becomes a peak and a scanning position where the phase becomes 0 are calculated. On the basis of a difference between the scanning positions, a value of a position shift due to a phase change of reflecting light from a sample surface is detected. On the basis of magnitude of the value, determination is made as to whether a sample surface of a pixel and a sample surface of other pixel are of same type or different type. For pixels of the same type, an average of shifts of scanning positions where the phase of the interference waveform becomes 0 is calculated. Then for each of the pixels, from a measurement value of a position where the phase becomes 0, the average of the shifts of the scanning positions where the phase of material on a corresponding sample surface becomes 0 is subtracted. This allows the influence of the phase change of the reflecting light to be cancelled, thus enabling measurement of the sample surface shape. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
