| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for controlling an electron microscope, an electron microscope, a program and an information storage medium which allow acquisition of image data with uniform reliability of luminance values of pixels, and effective reduction in time required to acquire image data from an image in one frame. <P>SOLUTION: A method comprises the steps of: determining an average value m of detected signals successively acquired when an electron beam is applied to a position on a sample corresponding to a given pixel of an electron microscope image; determining, on the basis of the determined average value m, whether or not a probabilityγthat an expectation valueμof the population of the detected signals lies in a reliability interval m±k exceeds a predetermined threshold p; repeating both steps of the determination until the probabilityγexceeds the predetermined threshold p and, if it is determined that the probabilityγhas exceeded the predetermined threshold p, outputting the determined average value m as a pixel value of the electron microscope image corresponding to the beam-applied position; and controlling the shift of the electron beam-applied position as scan of the electron beam. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
