发明名称 透明ガスバリアフィルム、透明ガスバリアフィルムの製造方法、有機エレクトロルミネッセンス素子、太陽電池および薄膜電池
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a transparent gas-barrier film that has excellent gas-barrier properties even when made of a small number of layers, and to provide a method of efficiently manufacturing the transparent gas-barrier film with the excellent gas-barrier properties through the same formation process in the same vacuum chamber. <P>SOLUTION: The gas-barrier film has a transparent gas-barrier layer with the gas-barrier properties formed on a resin substrate. The transparent gas-barrier layer is a laminated transparent gas-barrier layer formed by laminating an inorganic layer and a carbon-containing layer. The inorganic layer is formed by an evaporation method using arc-discharge plasma, and contains at least either a metal or a semimetal and at least either oxygen or nitrogen. The carbon-containing layer is formed by the evaporation method using the arc-discharge plasma and contains at least either a metal or a semimetal and carbon. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5740179(B2) 申请公布日期 2015.06.24
申请号 JP20110043285 申请日期 2011.02.28
申请人 发明人
分类号 B32B9/00;C23C14/08 主分类号 B32B9/00
代理机构 代理人
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