发明名称 超臨界流体用圧力制御装置
摘要 <p>An object of the present invention is to provide a pressure control apparatus for a supercritical fluid in which variation in pressure is small even in measurement in which analysis conditions are changed with time to improve separation and other performance. That is, a pressure control apparatus for a supercritical fluid according to the present invention includes: a valve comprising; a valve chamber provided in a midway of a channel through which a supercritical fluid passes; and an electrically-operated valve element located in the valve chamber; wherein a front end of the valve element fits into the valve chamber when the valve is closed, and it travels backward when the valve is opened; a pressure detection member for detecting the pressure of the supercritical fluid in the channel on an upstream or downstream side of the valve chamber; an open/close control member for controlling the pressure detected by the pressure detection member to be a target pressure; and a valve-opening rate adjustment member for adjusting the valve-opening rate when the valve is opened based on the state of the supercritical fluid.</p>
申请公布号 JP5738572(B2) 申请公布日期 2015.06.24
申请号 JP20100236296 申请日期 2010.10.21
申请人 发明人
分类号 G05D16/20;F16K31/02;F16K31/06;F16K37/00 主分类号 G05D16/20
代理机构 代理人
主权项
地址