Micromachined energy harvester with a thermoelectric generator and method for manufacturing the same

摘要

For providing a very compact thermoelectric generator harvester using a heat storage medium, the invention provides an energy harvester (10), comprising at least one thermoelectric generator (20) characterized by a housing (14) formed at least partly by MEMS manufacturing from a substrate (22), wherein a heat storage medium (18) is included in a chamber (16) in the housing (14). Preferably, the at least one thermoelectric generator (20) is produced on the substrate (22) or is fixed to the substrate (22). Further, a method for manufacturing such thermoelectric generator (12) is provided.