MICRO COPPER WIRE MANUFACTURING METHOD AND MANUFACTURING METHOD USING THE SAME TRANSISTOR

摘要

A method to manufacture a copper wire includes: a step of forming a coating layer including a copper nano particle on an upper part of a substrate; a step of emitting laser to the coating layer; and a step of removing a residual coating layer. The copper nano particle includes not less than 90% of copper. The step of emitting laser to the coating layer performs scanning at 1-3000mm/s of laser scanning speed.