发明名称 永久磁石を備えた磁場成分の勾配センサ
摘要 <p>The measuring sensor has an elementary sensor including a deformable mass (31) provided with a permanent magnet (32) whose direction of magnetization (M) is collinear with a direction of a gradient of a magnetic field component. The mass is deformed under the effect of force induced on the magnet by the gradient, and anchored on a fixed support device (33) by opposite anchoring points (36). The elementary sensor has a capacitive measuring unit that is constituted of electrodes (35.1, 35.2) for measuring an electrical parameter indicating mass deformation/constraints generated by the gradient. An independent claim is also included for a method for fabricating a magnetic field component gradient measuring sensor.</p>
申请公布号 JP5740093(B2) 申请公布日期 2015.06.24
申请号 JP20100048928 申请日期 2010.03.05
申请人 发明人
分类号 G01R33/02 主分类号 G01R33/02
代理机构 代理人
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