发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND ADHESION ENHANCER
摘要 <p>The present invention provides a photosensitive resin composition comprising (a) an alkali-soluble resin, (b) a silicon compound having a secondary aromatic amino group and an alkoxy group, and (c) at least one selected from a photopolymerization initiator, a photo acid generator and a photo base generator. According to the present invention, it is possible to obtain a photosensitive resin composition which remarkably enhances the adhesion property with a substrate after curing without deteriorating storage stability of a solution, and does not cause peeling of a fine pattern even upon development.</p>
申请公布号 EP1909142(B1) 申请公布日期 2015.06.24
申请号 EP20060732022 申请日期 2006.04.18
申请人 TORAY INDUSTRIES, INC. 发明人 YUBA, TOMOYUKI;FUJITA, YOJI;TOMIKAWA, MASAO
分类号 G03F7/085;C08K5/544;G03F7/075 主分类号 G03F7/085
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