APPARATUS FOR LOADING SUBSTRATE

摘要

Disclosed is an apparatus for loading a substrate. According to an embodiment of the present invention, the apparatus for loading a substrate comprises: a carrier conveyor supporting a carrier in which a plurality of substrates are installed to be movable; and a substrate handling unit for loading the carrier combined on the carrier conveyor to be movable so that a plurality of substrates loaded on the loading position of the substrate which is adjacent to the carrier conveyor are transferred to the carrier on the carrier conveyor, and can be installed.