| 摘要 |
<p>The light from the light source of the broadband light is reflected by VIPA so that reflection distance changes step by step. In VIPA, the light that phase changed is generated depending on the depth of the step. Interference profile is measured by this reflected light and optical path length modulator by synthetic light with the generated light frequency comb. The interferometer does not have a movable scanning mechanism, and the operation of the Fourier transform is unnecessary.
Thus, it has the measurement of the short time. Also, measurement of the measurement of the coaxial tomography and the one-dimensional dislocation of the depth direction is possible. The measurement of the two-dimensional dislocation of the depth direction is possible.</p> |
