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发明名称
炭化珪素ショットキバリアダイオードの製造方法
摘要
申请公布号
JP5738376(B2)
申请公布日期
2015.06.24
申请号
JP20130207209
申请日期
2013.10.02
申请人
发明人
分类号
H01L21/329;H01L29/47;H01L29/872
主分类号
H01L21/329
代理机构
代理人
主权项
地址
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