发明名称 マスクプログラム可能なアンチヒューズ構造
摘要 <p>A memory array having both mask programmable and one-time programmable memory cells connected to the wordlines and the bitlines. All memory cells of the memory array are configured as one-time programmable memory cells. Any number of these one-time programmable memory cells are convertible into mask programmable memory cells through mask programming, such as diffusion mask programming or contact/via mask programming. Manufacturing of such a hybrid memory array is simplified because both types of memory cells are constructed of the same materials, therefore only one common set of manufacturing process steps is required. Inadvertent user programming of the mask programmable memory cells is inhibited by a programming lock circuit.</p>
申请公布号 JP5738380(B2) 申请公布日期 2015.06.24
申请号 JP20130220004 申请日期 2013.10.23
申请人 发明人
分类号 H01L27/10;G11C16/04;G11C17/06;H01L21/8246;H01L27/112 主分类号 H01L27/10
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