| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enable accurate and high-speed auto-focus processing. <P>SOLUTION: An image measuring device comprises: an imaging apparatus having a variable frame rate for imaging a work; an illuminator which illuminates the work with light; a position control system which controls the focal position of the imaging apparatus to output the focal position as a positional information in the direction of a focal axis; and a controller which, in control of the focal position by the position control system, controls the frame rate of the imaging apparatus and adjusts the amount of light of the illuminator in accordance with the frame rate of the imaging apparatus. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
