| 摘要 |
<p>Provided is a position detecting device, which can correct, even if the position detecting device comprises a first objective optical element and a second objective optical element, the positional discrepancies of the optical axes of those optical elements, thereby to perform highly precise position detection. The position detecting device (70) comprises the first objective optical element (13), a first imaging unit (12) for receiving a luminous flux having passed through the first objective optical element, the second objective optical element (23) arranged to face the first objective optical element (13), a second imaging unit (22) for receiving a luminous flux having passed through the second objective optical element, and an adjusting unit (60) for adjusting the relative positional discrepancies between the optical axis of the first objective optical element and the optical axis of the second objective optical element.</p> |
