Support construction, fixing element and method

摘要

The invention relates to a support construction (1) for fabrication equipment of microscopic structures, comprising a monolithic foundation body (3) on which, for fixing the fabrication equipment, a fixing element (6) is provided comprising a resilient element. The fixing element further comprises a rigid element (10) whose rigidity decreases significantly when applying a dynamic force to the fixing element which force exceeds a predetermined threshold value. The support construction is further designed such that, regardless of the size of the dynamic force applied to the fixing element, a static force applied to the fixing element is substantially transmitted via the resilient element to the foundation body.

主权项

1. A support construction for fabrication equipment of microscopic structures, comprising:
a monolithic foundation body, on which, for fixing the fabrication equipment, a fixing element is provided which comprises a resilient element, the fixing element further comprising a rigid element whose rigidity decreases significantly when applying a dynamic force to the fixing element which force exceeds a predetermined threshold value, the support construction being further designed such that, regardless of the magnitude of a dynamic force applied to the fixing element, a static force applied to the fixing element by the fabrication equipment is transmitted substantially via the resilient element to the foundation body, the balance of the static force applied to the fixing element by the fabrication equipment is transmitted via the rigid element to the foundation body.