| 发明名称 | Photo diode and method of forming the same | ||
| 摘要 | A method for forming a photo diode is provided. The method includes: forming a first bottom electrode corresponding to a first pixel and a second bottom electrode corresponding to a second pixel over a substrate; forming a dielectric layer over the substrate; patterning the dielectric layer over the substrate; forming a photo conversion layer over the substrate; and forming a top electrode over the photo conversion layer; forming a color filter layer over the top electrode, wherein at least a portion of the dielectric layer separates a first portion of the color filter layer corresponding to a first pixel from a second portion of the color filer layer corresponding to a second pixel, and a refractive index of the dielectric layer is lower than a refractive index of the color filter layer. | ||
| 申请公布号 | US9064986(B2) | 申请公布日期 | 2015.06.23 |
| 申请号 | US201314025890 | 申请日期 | 2013.09.13 |
| 申请人 | Taiwan Semiconductor Manufacturing Company Limited | 发明人 | Wang Tzu-Jui;Chou Keng-Yu;Chuang Chun-Hao;Hsu Ming-Chieh;Yamashita Yuichiro;Liu Jen-Cheng;Yaung Dun-Nian |
| 分类号 | H01L21/00;H01L31/113;H01L31/0232;H01L31/18 | 主分类号 | H01L21/00 |
| 代理机构 | Jones Day | 代理人 | Jones Day |
| 主权项 | 1. A method for forming a photo diode, comprising: forming a first bottom electrode corresponding to a first pixel and a second bottom electrode corresponding to a second pixel over a substrate; forming a dielectric layer over the substrate; patterning the dielectric layer over the substrate; forming a photo conversion layer over the substrate; forming a top electrode over the photo conversion layer; and forming a color filter layer over the top electrode, wherein at least a portion of the dielectric layer separates a first portion of the color filter layer corresponding to a first pixel from a second portion of the color filer layer corresponding to a second pixel, and a refractive index of the dielectric layer is lower than a refractive index of the color filter layer. | ||
| 地址 | Hsinchu TW | ||