Metal-oxide-metal capacitor apparatus with a via-hole region

摘要

A metal-oxide-metal capacitor comprises a first electrode, a second electrode, a plurality of first fingers and a plurality of second fingers. Each first finger and its corresponding second finger are in parallel and separated by a low k dielectric material. A via-hole region is employed to enclose the metal-oxide-metal capacitor so as to remove the moisture stored in the low k dielectric material.

主权项

1. An apparatus comprising:
a metal-oxide-metal capacitor comprising a low k dielectric insulation layer and a via plug formed in the low k dielectric insulation layer, wherein the metal-oxide-metal capacitor is over a semiconductor substrate; and a via-hole region enclosing the metal-oxide-metal capacitor, wherein the via-hole region comprises a plurality of via holes, and wherein the via-hole region comprises upper via holes formed in an upper metal-oxide-metal layer of the metal-oxide-metal capacitor and in direct contact with a first side of the low k dielectric insulation layer and bottom via holes formed in a lower metal-oxide-metal layer of the metal-oxide-metal capacitor and in direct contact with a second side of the low k dielectric insulation layer.