发明名称 |
Semiconductor device and method for manufacturing same |
摘要 |
Disclosed is a semiconductor device provided with: lower-layer wiring formed on a substrate, an interlayer insulating film covering the lower-layer wiring, and a first upper-layer wiring line (18b) and a second upper-layer wiring line (18c) arranged on the interlayer insulating film and intersecting with the lower-layer wiring, and a level-difference adjustment protrusion is provided between the first upper-layer wiring line (18b) and the second upper-layer wiring line (18c) adjacent to a side section of the lower-layer wiring. |
申请公布号 |
US9064867(B2) |
申请公布日期 |
2015.06.23 |
申请号 |
US201113704396 |
申请日期 |
2011.04.20 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
Asano Norihisa;Imae Kazuyoshi |
分类号 |
H01L23/48;H01L23/522;G02F1/1368;H01L27/12;H01L29/786;H01L21/768 |
主分类号 |
H01L23/48 |
代理机构 |
Chen Yoshimura LLP |
代理人 |
Chen Yoshimura LLP |
主权项 |
1. A semiconductor device, comprising:
a lower-layer wiring line formed on a substrate; an interlayer insulating film covering the lower-layer wiring line; a first upper-layer wiring line and a second upper-layer wiring line arranged on the interlayer insulating film so as to intersect the lower-layer wiring line; and a level-difference adjustment island-disposed between the first upper-layer wiring line and the second upper-layer wiring line adjacent to a side of the lower-layer wiring line, wherein the level-difference adjustment island includes a first level-difference adjustment island and a second level-difference adjustment island that is formed so as to overlap the first level-difference adjustment island on a side closer to the lower-layer wiring line. |
地址 |
Osaka JP |