Dual image method and system for generating a multi-dimensional image of a sample

摘要

The present invention relates in part to a method for generating a multi-dimensional image of a sample which combines different image capturing modalities with data analysis capability for identifying and integrating the higher accuracy image features captured by each respective modality to yield reconciled image data of higher accuracy and consistency. A system which can be used to perform the method also is included.

主权项

1. A method for generating a multi-dimensional image of a sample, comprising:
capturing a first two-dimensional substrate image of a surface region of the sample with a first image capturing modality, wherein the first two-dimensional substrate image is a surface electron two-dimensional substrate image and wherein locations of at least one material at the surface region are captured; capturing a second two-dimensional substrate image of the surface region with a second image capturing modality which is different from the first image capturing modality, wherein the second image capturing modality provides greater accuracy with respect to locations of at least one material at the surface region than the first image capturing modality; spatially aligning the first two-dimensional substrate image based on the second two-dimensional substrate image; generating a first corrected two-dimensional substrate image based at least in part on the locations of the at least one material in the second two-dimensional substrate image, wherein said generating comprises determining a porosity of the substrate based on the surface electron two-dimensional substrate image corrected by comparison to the second two-dimensional substrate image.