Two degree of freedom dithering platform for MEMS sensor calibration

摘要

Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.

主权项

1. A method for fabricating a micro-electromechanical system (MEMS) sensing device, the method comprising:
forming a MEMS sensor layer, the MEMS sensor layer comprising:
a MEMS sensor; andan in-plane rotator configured to rotate the MEMS sensor in the plane of the MEMS sensor layer; forming a first rotor layer and a second rotor layer; bonding the first rotor layer to a top surface of the MEMS sensor layer and bonding the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first rotor portion of the first rotor layer and a second rotor portion of the second rotor layer connect to the MEMS sensor; and separating the first rotor portion from the first rotor layer and the second rotor portion from the second rotor layer, wherein the first rotor portion, MEMS sensor, and second rotor portion rotate about an axis in the plane of the MEMS sensor layer.