发明名称 |
Negative photosensitive resin composition, pattern formation method, and liquid discharge head |
摘要 |
A photosensitive resin composition includes a cationically polymerizable compound, a photoacid generating agent having an anion portion and a cation portion, and a salt having a cation portion having either one of a quaternary ammonium structure and a quaternary phosphonium structure and an anion portion, wherein the anion portion of the salt is exchanged with the anion portion of a first acid derived from the anion portion of the photoacid generating agent to form a second acid having acid strength that is lower than acid strength of the first acid. |
申请公布号 |
US9061499(B2) |
申请公布日期 |
2015.06.23 |
申请号 |
US201113576906 |
申请日期 |
2011.01.27 |
申请人 |
Canon Kabushiki Kaisha |
发明人 |
Takahashi Hyo;Ikegame Ken;Shimomura Masako |
分类号 |
G03C1/00;G03F7/00;G03F1/00;G01D11/00;B41J2/16;G03F7/004;G03F7/038 |
主分类号 |
G03C1/00 |
代理机构 |
Canon USA Inc. IP Division |
代理人 |
Canon USA Inc. IP Division |
主权项 |
1. A photosensitive resin composition comprising:
a cationically polymerizable compound; a photoacid generating agent having an anion portion and a cation portion; and a salt having a cation portion having either one of a quaternary ammonium structure and a quaternary phosphonium structure and an anion portion, wherein the anion portion of the salt is exchanged with the anion portion of a first acid derived from the anion portion of the photoacid generating agent to form a second acid having acid strength that is lower than acid strength of the first acid, wherein the photoacid generating agent includes a plurality of types of compounds, and a number of moles of the salt is larger than ¼ times of a number of moles of the photoacid generating agent generating the acid having the highest acid strength among the plurality of types of compounds. |
地址 |
Tokyo JP |