发明名称 Negative photosensitive resin composition, pattern formation method, and liquid discharge head
摘要 A photosensitive resin composition includes a cationically polymerizable compound, a photoacid generating agent having an anion portion and a cation portion, and a salt having a cation portion having either one of a quaternary ammonium structure and a quaternary phosphonium structure and an anion portion, wherein the anion portion of the salt is exchanged with the anion portion of a first acid derived from the anion portion of the photoacid generating agent to form a second acid having acid strength that is lower than acid strength of the first acid.
申请公布号 US9061499(B2) 申请公布日期 2015.06.23
申请号 US201113576906 申请日期 2011.01.27
申请人 Canon Kabushiki Kaisha 发明人 Takahashi Hyo;Ikegame Ken;Shimomura Masako
分类号 G03C1/00;G03F7/00;G03F1/00;G01D11/00;B41J2/16;G03F7/004;G03F7/038 主分类号 G03C1/00
代理机构 Canon USA Inc. IP Division 代理人 Canon USA Inc. IP Division
主权项 1. A photosensitive resin composition comprising: a cationically polymerizable compound; a photoacid generating agent having an anion portion and a cation portion; and a salt having a cation portion having either one of a quaternary ammonium structure and a quaternary phosphonium structure and an anion portion, wherein the anion portion of the salt is exchanged with the anion portion of a first acid derived from the anion portion of the photoacid generating agent to form a second acid having acid strength that is lower than acid strength of the first acid, wherein the photoacid generating agent includes a plurality of types of compounds, and a number of moles of the salt is larger than ¼ times of a number of moles of the photoacid generating agent generating the acid having the highest acid strength among the plurality of types of compounds.
地址 Tokyo JP