Method for forming microelectrode-pair arrays on silicon substrate surface with hydrophobic silicon pillars

摘要

Provided is a method of forming large-area directionally aligned nanowires on a silicon wafer surface with hydrophobic silicon pillars so as to form microelectrode-pair arrays, which belongs to the field of electronic circuit. The method includes grafting fluoroalkylsilane on the surface of a silicon wafer with hydrophilic silicon pillar arrays; increasing the contact angle between the surface of the hydrophilic silicon pillar arrays and water from 10° to 150° above and obtaining the silicon wafer with hydrophobic silicon pillar arrays; driving water solution containing materials used for forming nanowires to flow across the surface with the hydrophobic silicon pillar arrays uniformly, so that directionally aligned nanowires are formed on the tops of each two adjacent silicon pillars in the hydrophobic silicon pillar arrays; each of the nanowires connects the two adjacent silicon pillars together so as to form a microelectrode-pair, and a plurality of microelectrode-pairs constitute the microelectrode-pair arrays.

主权项

1. A method for building an array of microelectrode pairs on the surface of a silicon wafer having hydrophobic silicon pillars, comprising the steps of:
dispensing fluoroalkylsilane on to a silicon wafer having a first surface with an array of hydrophilic silicon pillars thereon; controlling the fluoroalkylsilane to modify the array of hydrophilic silicon pillars using a grafting reaction to produce a hydrophobic silicon pillar array on the first surface; and driving a water solution containing a substance for forming nanowires across top surfaces of at least two adjacent hydrophobic silicon pillars at a constant flow rate to form nanowires in a directional arrangement on the tops of the adjacent silicon pillars, wherein microelectrode pairs are formed by connecting a nanowire to the adjacent silicon pillars.