Component having a micromechanical microphone structure

摘要

A micromechanical microphone structure configured as a layered structure includes: a semiconductor substrate; a diaphragm structure having an acoustically active diaphragm which at least partially spans a sound opening in the back side of the substrate and is provided with a movable electrode of a microphone capacitor, which diaphragm structure has openings via which pressure compensation occurs between the back side and the front side of the diaphragm; a stationary acoustically permeable counterelement having vents, which counterelement is situated in the layered structure above the diaphragm and which functions as a carrier for a nonmovable electrode of the microphone capacitor; and at least one ridge-like structural element which is situated at the outer edge area of the diaphragm, and which protrudes from the diaphragm plane into corresponding recesses in an adjoining layer.

主权项

1. A component having a micromechanical microphone structure configured as a layered structure on a semiconductor substrate, comprising:
a diaphragm structure having an acoustically active diaphragm which at least partially spans a sound opening in the back side of the substrate and is provided with a movable electrode of a microphone capacitor, wherein the diaphragm structure has openings via which pressure compensation occurs between the back side and the front side of the diaphragm; a stationary acoustically permeable counterelement having vents, wherein the counterelement is situated in the layered structure above the diaphragm and functions as a carrier for a nonmovable electrode of the microphone capacitor; wherein the diaphragm is provided with at least one ridge-like structural element which emerges from the diaphragm plane and is situated at an outer edge area of the diaphragm, and wherein the ridge-like structural element protrudes, even during sound-related diaphragm deflections, into a corresponding recess in a layer on an opposite side of an air gap adjoining the diaphragm surface, without hindering sound-related diaphragm deflections.