Waveguide coupled surface plasmon polarition photo detector

摘要

A metal-semiconductor-metal (MSM) device couples light from an optical mode in a waveguide to a surface plasmon polarition (SPP) mode on an electrode surface of the MSM device. Once in an SPP mode, the absorption of light in the semiconductor can take place in a very small area. This may allow for a shrinking of the active detector area and allow for low capacitance, very short transit distance for the electrical carriers and allow for very low voltage devices and/or very high frequency.

主权项

1. An apparatus, comprising:
a metal-semiconductor-metal (MSM) photodetector configured to transform a light signal from waveguide mode to surface plasmon polarition (SPP) mode, the MSM photodetector comprising first and second electrodes and a semiconductor material substantially disposed in a cladding layer, wherein the first and second electrodes are disposed to extend from a surface of the cladding layer inside the cladding layer, wherein the first and second electrodes include respective top and bottom portions, wherein respective ends of the top portions of the first and second electrodes abut a surface of the cladding layer, and the bottom portions of the first and second electrodes extend inside the cladding layer; and a waveguide configured to carry the light signal in the waveguide mode and placed relative to the first electrode such that the first electrode is located between the waveguide and the semiconductor material, wherein the semiconductor material is disposed to partially extend into the respective bottom portions of the first and second electrodes, wherein the first and second electrodes are spaced at a determined distance.