Method for manufacturing light-emitting element, and light-emitting element

摘要

Provided are a method of manufacturing a light-emitting element by which a light-emitting element (80) is manufactured through the following steps and a light-emitting element manufactured by employing the method. A light-emitting element layer (40) is formed on one face (32T) of a monocrystalline substrate (30A) for a light-emitting element. Next, the other face (32B) of the monocrystalline substrate (30A) for a light-emitting element is polished until a state where a vertical hole (34A) penetrates the monocrystalline substrate (30A) for a light-emitting element in its thickness direction is established. Next, a conductive material is filled into the vertical hole (34B) from the side of the vertical hole (34B) closer to an opening (36B) in the other face (32B) to form a conductive portion (50) that is continuous from a side closer to the light-emitting element layer (40) to the opening (36B) in the other face (32B).

主权项

1. A method of manufacturing a light-emitting element, comprising at least:
a light-emitting element layer-forming step of forming a light-emitting element layer on one face of a monocrystalline substrate for a light-emitting element provided with a vertical hole having an opening only in the one face; a polishing step of polishing another face of the monocrystalline substrate for a light-emitting element until a state where the vertical hole penetrates the monocrystalline substrate for a light-emitting element in a thickness direction thereof is established after performing at least the light-emitting element layer-forming step; and a conductive portion-forming step of filling a conductive material into the vertical hole from a side of the vertical hole closer to an opening in the another face after performing at least the polishing step to form a conductive portion that is continuous from a side closer to the light-emitting element layer to the opening in the another face.