Inactive gas introducing facility and inactive gas introducing method

摘要

An inactive gas introducing facility includes an introducing device for introducing inactive gas to the inside of a container stored in a storage section of a storage shelf with discharging gas present inside the container to the inside of a storage space partitioned from the outside and a controller for controlling operation of the introducing device. In a normal stop mode, the controller controls the operation of the introducing device to stop feeding of inactive gas to the container in response to detection of an opened state of an inspection door. And, in a stop nullification mode, the controller controls the operation of the introducing device to continue feeding of inactive gas to the container even in response to detection of the opened state of the inspection door.

主权项

1. An inactive gas introducing facility comprising:
a storage shelf disposed in a storage space partitioned from the outside and having storage sections each storing a container for accommodating a substrate; an introducing device for introducing inactive gas to the inside of the container stored in the storage section through a gas feed opening of the container with discharging gas present inside the container to the inside of the storage space through a gas discharge opening of the container; a controller for controlling operation of the introducing device; an inspection-door opening/closing detecting device for detecting an opened/closed state of an inspection door allowing access of a worker to/from the inside of the storage space; and a manual operation type stop nullification commanding device for issuing a stop nullification command to the controller; wherein in a normal stop mode which is executed when the stop nullification command is not issued by the stop nullification commanding device, the controller controls the operation of the introducing device to stop feeding of inactive gas to the container if the inspection-door opening/closing detecting device detects an opened state of the inspection door; and in a stop nullification mode which is executed when the stop nullification command is issued by the stop nullification commanding device, the controller controls the operation of the introducing device to continue feeding of inactive gas to the container even if the inspection-door opening/closing detecting device detects the opened state of the inspection door.