Nanoindenter

摘要

A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.

主权项

1. An assembly, comprising:
a measuring instrument which includes a connection to a measuring part, an actuator for said measuring part, and sensors for measuring displacement and force of said measuring part, where said measuring part is adapted to connect to an optical lever that has a lever that moves at a non-perpendicular angle relative to a sample being measured; and an indenter portion, including an indenter probe, said indenter portion being movable to move perpendicularly relative to the sample being measured, and connects to said connection and uses the same actuator and sensors as said measuring part, wherein said indenter portion includes a three-dimensional flexure through which the indenter probe is moved by said actuator in a Z axis direction, which is a direction perpendicular to a plane of the flexure and perpendicular to the sample being measured.