| 发明名称 | Methods of fabrication of graphene nanoribbons | ||
| 摘要 | Methods of fabricating graphene nanoribbons include depositing a catalyst layer on a substrate. A masking layer is deposited on the catalyst layer. The masking layer and the catalyst layer are etched to form a structure on the substrate, the structure comprising a portion of the catalyst layer and a portion of the masking layer disposed on the catalyst layer, with sidewalls of the catalyst layer being exposed. A graphene layer is formed on a sidewall of the catalyst layer with a carbon-containing gas. | ||
| 申请公布号 | US9061912(B2) | 申请公布日期 | 2015.06.23 |
| 申请号 | US201313910327 | 申请日期 | 2013.06.05 |
| 申请人 | The Regents of the University of California | 发明人 | Zhang Yuegang |
| 分类号 | C23C16/26;C01B31/02;B82Y30/00;C01B31/04;B82Y40/00 | 主分类号 | C23C16/26 |
| 代理机构 | Lawrence Berkeley National Laboratory | 代理人 | Lawrence Berkeley National Laboratory |
| 主权项 | 1. A method comprising: (a) depositing a catalyst layer on a substrate; (b) depositing a masking layer on the catalyst layer; (c) etching the masking layer and the catalyst layer to form a structure on the substrate, the structure comprising a portion of the catalyst layer and a portion of the masking layer disposed on the catalyst layer, sidewalls of the catalyst layer being exposed; and (d) forming a graphene layer on a sidewall of the catalyst layer with a carbon-containing gas. | ||
| 地址 | Oakland CA US | ||