发明名称 Systems and methods for cooling an optic
摘要 Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.
申请公布号 US9066412(B2) 申请公布日期 2015.06.23
申请号 US201012900762 申请日期 2010.10.08
申请人 ASML Netherlands B.V. 发明人 Ershov Alexander I.;Morse Robert L.;Partlo William N.;Pate Christopher P.
分类号 G02B7/02;G02B3/12;G02B1/06;H05G2/00;G02B7/00;G03F7/20 主分类号 G02B7/02
代理机构 代理人
主权项 1. A device comprising: an optic having a non-planar surface and an annular periphery, the nonplanar surface having an optically active portion, the optic representing a lens for focusing light passing through the nonplanar surface toward a focal spot; and a flow guide disposed concentrically surrounding and outside of said periphery, said flow guide having a plurality of nozzles disposed on an inward facing surface of said flow guide, said plurality of nozzles directing gas upon said non-planar surface to produce turbulent flow on at least a portion of the optically active portion of said non-planar surface to cool said optic.
地址 Veldhoven NL