发明名称 |
Systems and methods for cooling an optic |
摘要 |
Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic. |
申请公布号 |
US9066412(B2) |
申请公布日期 |
2015.06.23 |
申请号 |
US201012900762 |
申请日期 |
2010.10.08 |
申请人 |
ASML Netherlands B.V. |
发明人 |
Ershov Alexander I.;Morse Robert L.;Partlo William N.;Pate Christopher P. |
分类号 |
G02B7/02;G02B3/12;G02B1/06;H05G2/00;G02B7/00;G03F7/20 |
主分类号 |
G02B7/02 |
代理机构 |
|
代理人 |
|
主权项 |
1. A device comprising:
an optic having a non-planar surface and an annular periphery, the nonplanar surface having an optically active portion, the optic representing a lens for focusing light passing through the nonplanar surface toward a focal spot; and a flow guide disposed concentrically surrounding and outside of said periphery, said flow guide having a plurality of nozzles disposed on an inward facing surface of said flow guide, said plurality of nozzles directing gas upon said non-planar surface to produce turbulent flow on at least a portion of the optically active portion of said non-planar surface to cool said optic. |
地址 |
Veldhoven NL |