X-ray analysis apparatus and method of X-ray analysis

摘要

An X-ray analysis apparatus includes: an X-ray source that emits an X-ray irradiating a specimen; a specimen holding unit that holds the specimen; and an X-ray detecting unit that detects the X-ray diffracted by the specimen; wherein the specimen holding unit includes a second φ-axis rotating stage rotating the specimen about a φ-axis, a first φ-axis rotating stage rotating the entirety of the second φ-axis rotating stage about the φ-axis, the second φ-axis rotating stage being disposed on the first φ-axis rotating stage, a φ-axis rotating stage that rotates the entirety of the first φ-axis rotating stage about a φ-axis, an ω-axis rotating stage that rotates the entirety of the χ-axis rotating stage about an ω-axis, and a 2θ-axis rotating stage rotating the X-ray detecting unit about the 2θ-axis, wherein the second φ-axis rotating stage unit rotates at a speed higher than that of the first φ-axis rotating stage.

主权项

1. An X-ray analysis apparatus comprising:
an X-ray source that emits an X-ray, a specimen being irradiated with the X-ray; a specimen holding unit that holds the specimen; and an X-ray detecting unit that detects the X-ray diffracted by the specimen; wherein the specimen holding unit includes
a second φ-axis rotating stage that rotates the specimen about a φ-axis using a second φ-axis rotation drive unit,a first φ-axis rotating stage that rotates the entirety of the second φ-axis rotating stage about the φ-axis using a first φ-axis rotation drive unit, the second φ-axis rotating stage being disposed on the first φ-axis rotating stage,a χ-axis rotating stage that rotates the entirety of the first φ-axis rotating stage about a χ-axis,an ω-axis rotating stage that rotates the entirety of the χ-axis rotating stage about an ω-axis, anda 2θ-axis rotating stage that rotates the X-ray detecting unit about the 2θ-axis,wherein the second φ-axis rotation drive unit rotates at a speed higher than that of the first φ-axis rotation drive unit.