发明名称 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which can prevent a metal thin film resistive element from being connected to a lower distribution line; and which can achieve reduction in manufacturing time and reduction in mask preparation cost.SOLUTION: A semiconductor device comprises: first and second conductive etching stopper films 21, 22 formed at a distance from each other on a lower interlayer insulation film 8; a metal thin film resistive element 23 formed on the lower interlayer insulation film 8 so as to bridge both etching stopper films 21, 22; a first contact hole 27 formed on an upper interlayer insulation film 9 to pierce the upper interlayer insulation film 9 from the surface and pierce the metal thin film resistive element 23 until reaching the first etching stopper film 21; and a second contact hole 28 formed on the upper interlayer insulation film 9 to pierce the upper interlayer insulation film 9 from the surface and pierce the metal thin film resistive element 23 until reaching the second etching stopper film 22.
申请公布号 JP2015115408(A) 申请公布日期 2015.06.22
申请号 JP20130255344 申请日期 2013.12.10
申请人 ROHM CO LTD 发明人 YAGI RYOTARO;KAGEYAMA SATOSHI
分类号 H01L21/822;H01L21/3205;H01L21/768;H01L23/522;H01L23/532;H01L27/04 主分类号 H01L21/822
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