发明名称 |
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device which can prevent a metal thin film resistive element from being connected to a lower distribution line; and which can achieve reduction in manufacturing time and reduction in mask preparation cost.SOLUTION: A semiconductor device comprises: first and second conductive etching stopper films 21, 22 formed at a distance from each other on a lower interlayer insulation film 8; a metal thin film resistive element 23 formed on the lower interlayer insulation film 8 so as to bridge both etching stopper films 21, 22; a first contact hole 27 formed on an upper interlayer insulation film 9 to pierce the upper interlayer insulation film 9 from the surface and pierce the metal thin film resistive element 23 until reaching the first etching stopper film 21; and a second contact hole 28 formed on the upper interlayer insulation film 9 to pierce the upper interlayer insulation film 9 from the surface and pierce the metal thin film resistive element 23 until reaching the second etching stopper film 22. |
申请公布号 |
JP2015115408(A) |
申请公布日期 |
2015.06.22 |
申请号 |
JP20130255344 |
申请日期 |
2013.12.10 |
申请人 |
ROHM CO LTD |
发明人 |
YAGI RYOTARO;KAGEYAMA SATOSHI |
分类号 |
H01L21/822;H01L21/3205;H01L21/768;H01L23/522;H01L23/532;H01L27/04 |
主分类号 |
H01L21/822 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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