| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition which is excellent in LWR performance, CDU performance, resolution, rectangularity of a cross-sectional shape, depth of focus, exposure latitude, and MEEF performance while securing good storage stability.SOLUTION: The radiation-sensitive resin composition contains a polymer having a structural unit containing an acid-dissociable group, a radiation-sensitive acid generator, and a compound having a partial structure represented by the formula (1). In the formula (1), Ris a hydrogen atom, a halogen atom, a nitro group, or a C1-C30 monovalent organic group, and Xis a monovalent radiation-sensitive onium cation. |
