| 摘要 |
<p>The purpose of the present invention is to heat surrounding areas of a processing part which conducts CVD processing in an efficient and effective manner while reducing the bending of an object to be processed. In the laser processing apparatus (101) which conducts laser CVD processing, an air heater (165) provides hot wind to areas near a processing part of a panel (131) through a gas window (161). The gas window (161) maintains a CVD space near the processing part as fuel gas atmosphere by discharging fuel gas from a gas suction and discharge unit (164). A cooling air unit (167) provides cooling air to areas around the processing part of the panel (131) through the gas window (161). A laser unit (163) transmits laser light to the processing part through a laser injection observation unit (162) and the gas window (161). The present invention would be applied to a laser repair device.</p> |
