发明名称 |
FUNCTION-TRANSFER BODY AND TRANSFER METHOD OF FUNCTIONAL LAYER |
摘要 |
PROBLEM TO BE SOLVED: To provide a function-transfer body which makes possible to provide an object to be processed with a nanostructure having chemically and physically high endurance with high precision; and a transfer method of a functional layer.SOLUTION: A function-transfer body (14) of the present invention comprises: a carrier (10) having an uneven structure (nanostructure)(11) in its surface; and at least one functional layer (12) provided on the uneven structure. The uneven structure has an average pitch of 1-1500 nm. The ratio (Ra/lor) of the surface roughness (Ra) of the functional layer (12) on the exposed side thereof to the distance (lor) between the position of the apex portion of protrusions of the uneven structure, and the exposed surface of the functional layer is 1.2 or less. The concentration of a carbon element is over 0 up to 60 atom% for the functional layer (12). |
申请公布号 |
JP2015115436(A) |
申请公布日期 |
2015.06.22 |
申请号 |
JP20130255929 |
申请日期 |
2013.12.11 |
申请人 |
ASAHI KASEI E-MATERIALS CORP |
发明人 |
FURUIKE JUN ; YAMAGUCHI FUJITO |
分类号 |
H01L21/027;B29C59/02;G02B1/11 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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