| 摘要 |
PROBLEM TO BE SOLVED: To easily discriminate whether or not a substrate is attracted normally by means of an electrostatic chuck, regardless of the type of a substrate to be handled.SOLUTION: A substrate holding device H includes an electrostatic chuck 2 having an electrode 11 internally, and including a substrate holding surface S for holding a substrate 1 on the side, a displacement meter 3 arranged above or below the substrate holding surface S, and a controller 6 for controlling the displacement meter 3 to measure a first distance to the substrate 1 when the substrate 1 is mounted on the substrate holding surface S, and to measure a second distance to the substrate 1 after a predetermined voltage is applied to the electrode 11 of the electrostatic chuck 2, and then discriminating whether or not the substrate 1 is attracted normally to the electrostatic chuck 2, based on the difference of the distances thus measured. |
