| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic storage element having higher reliability and a manufacturing method thereof. ! SOLUTION: In the magnetic storage element, a reference magnetic pattern 140a includes a first fixed pattern 110a, a second fixed pattern 135a between the first fixed pattern 110a and a tunnel barrier pattern 145a, and an exchange coupling pattern 115a between the first and second fixed patterns. The second fixed pattern 135a includes a polarization enhancement magnetic pattern 130a adjacent to the tunnel barrier pattern 145a, an exchange coupling enhancement magnetic pattern 120a adjacent to the exchange coupling pattern 115a, an intermediate magnetic pattern 125a between the polarization enhancement magnetic pattern 130a and the exchange coupling enhancement magnetic pattern 120a, and a non-magnetic pattern 123a coming into contact with the intermediate magnetic pattern 125a for inducing interface perpendicular magnetic anisotropy. ! COPYRIGHT: (C)2015,JPO&INPIT |
