| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method that can prevent a rinsing liquid comprising a non-polar substance having no polarity, such as a hydrocarbon solvent, from remaining on the surface of a workpiece. ! SOLUTION: In a cleaning method, after a cleaning step of cleaning a water-soluble deposits deposited on the surface of a workpiece W with a cleaning liquid containing water, a rinsing step is performed which rinses the surface of the workpiece W with a rinsing liquid comprising a first non-polar substance having no polarity, and a vacuum steam drying step is performed which accommodates the workpiece W in a vacuum steam drying tank 131 after the rinsing step, supplies steam comprising a second non-polar substance from a steam supply pipe 142 to liquefy the steam on the surface of the workpiece W, and decompresses the inside of the vacuum steam drying tank 131 using a vacuum pump 146 after the passage of a prescribed time. Residues of the first non-polar substance adhering to the surface of the |
