| 摘要 |
PROBLEM TO BE SOLVED: To provide a holder for a seal member capable of effectively holding the seal member by suppressing a risk of contaminating a seal member and the like by dusts generated in association with rubbing, and preventing fracture of the holder by improving its strength. ! SOLUTION: A holder for a seal member includes a pair of backing plates 10, 10A larger than a seal gasket 1 of a substrate storage container, and a plurality of sleeve poles 20 supported by the backing plates 10, 10A and fitted to an inner peripheral face of the seal gasket 10. The backing plates 10, 10A are provided with a plurality of mounting holes 11 penetrating through the sleeve poles 20, the mounting holes 11 are formed into a pentagon shape on a plane, and provided with a plurality of locking claws 13 on peripheral edge portions, the sleeve poles 20 are formed into a pentagon cross-sectional shape corresponding to the shape of the mounting hole 11 by bending a bendable plate material 21, and further provided with a p |
