TEMPERATURE MEASUREMENT METHOD, SUBSTRATE PROCESSING SYSTEM, AND MEMBER FOR TEMPERATURE MEASUREMENT

摘要

PROBLEM TO BE SOLVED: To provide a temperature measurement method capable of accurately measuring temperature using interference of low-coherence light even when an object whose temperature is to be measured is worn out or deposited with foreign material. ! SOLUTION: A temperature measurement method comprises the steps of: preparing calibration data representing a relationship between a focus ring 25 and an optical path length of a predetermined path; using optical interference of reflection light of low-coherence light when the low-coherence light is actually projected onto the focus ring 25 placed in a substrate processing apparatus 10 to determine the optical path length when the low-coherence light travels through the predetermined path within the focus ring 25; and determining the temperature of the focus ring 25 by comparing the determined optical path length with calibration data. The predetermined path is set such that the low-coherence light enters the focus ring 25 through a back face of the foc