| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method using a chromatic point sensor (CPS) apparatus to measure a geometric characteristic of a hole, such as a hole diameter or the like, without rotating an optical pen.SOLUTION: A hole measurement method using a non-rotating CPS pen comprises: (a) providing a CPS apparatus comprising an optical pen including a beam dividing deflecting element, the beam dividing deflecting element being capable of distributing the measurement light simultaneously along three measurement directions orthogonal to the central Z axis of the optical pen; (b) positioning the optical pen within a hole such that the measurement light is incident on an interior surface of the hole along the three measurement directions; (c) receiving the measurement light reflected from each measurement direction back through a confocal aperture in the optical pen; (d) obtaining a spectrum at the current position of the optical pen, the spectrum containing a plurality of peak components corresponding to the distance to the interior surface along each of the measurement directions; (e) and analyzing the profile to determine a first distance measurement value along the first measurement direction and determining the geometric characteristic of the hole on the basis of the first distance measurement value.</p> |
