发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor device which achieves reduction in on-state power loss and increase in breakdown resistance and which inhibits warpage of the device itself.SOLUTION: A semiconductor device comprises: linking regions 12 each of which has a constant trench gate distance and each of which has a smaller area and octagon-shaped regions 13 each of which has a larger area, which are formed at a cell corner part 11; and a high concentration P-type semiconductor layer 8 and a contact 9 which are provided in the octagon-shaped region 13. As a result, a gate capacitance ratio can be changed in a state of being insulated from an influence of a pattern in a main cell part and escape of hole carriers from the semiconductor device can be improved. In addition, warpage of the device itself can be inhibited by flexure of a second trench gate 2n.
申请公布号 JP2015115452(A) 申请公布日期 2015.06.22
申请号 JP20130256199 申请日期 2013.12.11
申请人 MITSUBISHI ELECTRIC CORP 发明人 MURAKAMI YUJI;TOKIOKA HIDETADA;FURUKAWA AKIHIKO;KAWAKAMI TAKASHI;OKUDA SATOSHI
分类号 H01L29/739;H01L29/12;H01L29/78 主分类号 H01L29/739
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