| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor pressure sensor in which an increase in man-hours due to design change is suppressed and which is capable of measuring a pressure range with high accuracy. ! SOLUTION: A semiconductor pressure sensor 11 according to the present invention has a diaphragm 21, a base board 45 disposed with a space provided between the diaphragm 21 and itself, a fixing part 22 provided in the base board 45 and enclosing the periphery of the diaphragm 21, and a plurality of piezoelectric resistance elements 31 provided at the outer circumference of the diaphragm 21, and is characterized in that a strut 26 is provided between the base board 45 and the diaphragm 21, and a ratio of the distance from the center of the strut 26 to the outer circumference of the strut 26 to the distance from the center of the strut 26 to the outer circumference of the diaphragm 21 is 0.3 or less. ! COPYRIGHT: (C)2015,JPO&INPIT |
