| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic capacity type transducer by which a wider band, and improvement of performance and reliability can be realized, and a method for manufacturing the same, etc. ! SOLUTION: A method for manufacturing an electrostatic capacity type transducer which has a cell 10 with a first electrode 3, and a vibration film 17 including a second electrode 7 formed at a gap 8 with the first electrode includes the following steps of: forming a sacrificial layer 12 on the first electrode; forming a membrane 5 on the sacrificial layer; forming an etching hole 13 on the membrane; and etching the sacrificial layer via the etching hole. The etching hole is encapsulated by forming an insulator film 6 by a first film formation condition, and forming the insulation film 6 by a second film formation condition. The first film formation condition is the one with anisotropy in which film formation speed in a vertical direction is high to film formation speed in a horizontal direction. In t |
