| 摘要 |
PROBLEM TO BE SOLVED: To provide a resonance sensor with enhanced reliability. ! SOLUTION: A resonance sensor 21 which is disposed on a strain member 22 for detecting a pressure applied to the strain member 22. The resonance sensor 21 includes: a first base plate 23 formed of an insulation material; and a second base plate 24 formed of a conductive material, which is laminated over the first base plate 23. A hermetic-sealed cavity 25 is formed between the first base plate 23 and the second base plate 24. The first base plate 23 has a drive electrode 26 at a position facing to the cavity 25. The second base plate 24 which faces to the drive electrode 26 includes a vibration body the resonance frequency of which changes when a pressure is applied to the strain member 22. ! COPYRIGHT: (C)2015,JPO&INPIT |
