| 摘要 |
PURPOSE: A pellicle container is provided to prevent impurity attachment to the pellicle by covering pellicle fixed to a container body, with a covering material, thereby authentically maintain the fixed state in transit. CONSTITUTION: A pellicle container consists of a container body(12) accommodating a pellicle(16) and a covering material(14) covering a pellicle. A pellicle fixing part is installed in the container body(18). The pellicle fixing part comprises a pin(28) which is rotatable by inserting a front end into a concave part(26) of a pellicle frame(16a); a pin mount part(32); and an opening(14a) which is formed in the covering material to rotate the pin in the pin mounting part; and a closing plate(40) of the opening. A protrusion and the notch part are located in the pin mounting part, for fixing the pin. |
