LANIO3 THIN FILM-FORMING COMPOSITION AND METHOD OF FORMING LANIO3 THIN FILM USING THE SAME

摘要

This LaNiO3 thin film-forming composition includes: LaNiO3 precursors; and acetic acid, wherein a ratio of an amount of the LaNiO3 precursors to 100 mass% of an amount of the LaNiO3 thin film-forming composition is in a range of 1 mass% to 20 mass% in terms of oxides, and the composition further includes a stabilizer containing N-methyl formamide in an amount of more than 0 mol to 10 mol or less per I mol of the 10 total amount of the LaNiO3 precursors in the composition. FIG. 1