VACUUM DEPOSITION APPARATUS COMPRISING SUPPORTER HAVING DIFFERENT TEMPERATURE LAYER

摘要

The present invention relates to a vacuum deposition apparatus having a support unit having different temperature layers comprising: a substrate; a nozzle unit injecting a vaporized fluid toward the substrate; a mask provided between the substrate and the nozzle unit; and a support unit provided between the nozzle unit and the mask and supporting the mask and dissipating heat in order to prevent the fluid from being deposited on a surface facing the nozzle.