| 发明名称 |
METHOD FOR ACTIVATING A POROUS LAYER SURFACE |
| 摘要 |
A method is provided for activating an exposed surface of a porous dielectric layer, the method comprising the steps of: filling with a first liquid at least the pores present in a part of the porous dielectric layer, the part comprising the exposed surface, removing the first liquid selectively from the surface, activating the exposed surface, and removing the first liquid from the bulk part of the porous dielectric layer. |
| 申请公布号 |
US2015170910(A1) |
申请公布日期 |
2015.06.18 |
| 申请号 |
US201414555356 |
申请日期 |
2014.11.26 |
| 申请人 |
IMEC VZW ;Katholieke Universiteit Leuven, KU LEUVEN R&D |
发明人 |
Le Quoc Toan;Baklanov Mikhail;Sun Yiting;Armini Silvia |
| 分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for enhancing the reactivity of an exposed surface of a porous dielectric layer, the method comprising:
providing a porous dielectric layer comprising a bulk part and an exposed surface, the bulk part comprising a bulk material and pores; filling the pores in a part of the porous dielectric layer with a first liquid, wherein the part of the porous dielectric layer comprises the exposed surface; removing the first liquid selectively from the exposed surface; enhancing a reactivity of the exposed surface, whereby an activated exposed surface is formed; and removing the first liquid from the bulk part of the porous dielectric layer. |
| 地址 |
Leuven BE |
